Microtransducers are fabricated using techniques similar to those for standard integrated circuits. However, the numerical simulation of microtransducers is considerably more complex. The quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book.

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic" effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Introduction
Basic Electronic Transport
Radiation Effects on Carrier Transport
Magnetic-Field Effects on Carrier Transport
Thermal Non-Uniformity Effects on Carrier Transport
Mechanical Effects on Carrier Transport
Mechanical and Fluidic Signals
Micro-Actuation
Microsystem Simulation.