Micromanufacturing
International Research and Development

This international technology assessment study has focused on the emerging global trend toward the miniaturization of manufacturing processes, equipment and systems for microscale components and products. The study has investigated both the state-of-the-art as well as emerging technologies from the scientific, technological, and commercialization perspectives across key industrial sectors in the USA, Asia and Europe.

Foreword
Table of Contents
List of Figures
List of Tables
Executive Summary

1. Introduction: Richard E. DeVor and Kornel F. Ehmann: Background and Scope

Methodology
Overview of the Report
Format for this Report
Acknowledgements

2. Design: Martin L. Culpepper and Thomas R. Kurfess
Abstract
The Approach Taken to Assess the State-of-the-Art in NLBMM Design
Unique Requirements for the Design of NLBMM Parts, Processes and Equipment
The Design Process and the Important Elements ofDesign of Y for NLBMM Products
The State-of-the-Art and Gaps between Existing and Required Capabilities
Summary and Conclusions
References
3. Materials:
David Bourell and Kamlakar Rajurkar: Abstract
Materials for Micromanufacturing

Materials Issues in Micromanufacturing
Summary and Conclusions
References

4. Processes: Kamlakar Rajurkar and Marc Madou: Abstract
Micromanufacturing Processes and Equipment
Micromanufacturing Issues
Summary and Conclusions

References
5. Metrology, Sensors and Control: Thomas R. Kurfess and Thom J. Hodgson: Abstract
Introduction
Summary and Conclusions
References
6. Non-lithography Applications: Marc Madou: Abstract
Applications ofNon-lithography Machining
Flexible Manufacturing and Desktop Manufacturing
MEMS Foundry

Summary
References
7. Business, Education, the Environment, and Other Issues:
Thom J. Hodgson: Abstract
Business
Education
Environment
Government Policies

APPENDICES : A. Panelist Biographies
B. Questionnaire for Site Visits

C. Site Reports--Asia: National Institute ofAdvanced Industrial Science and Technology (AIST)
Asia Pacific Microsystems, Inc. (APM)
FANUC, FA
Hitachi Chemical R&
D Center in Tsukuba
ITRI -- Mechanical Industry Research Laboratories (MIRL)
ITRI -- Nano Technology Research Center (NTRC)

Instrument Technology Research Center (ITRC)
Korean Advanced Institute of Science and Technology (KAIST)
Korean Institute ofMachinery and Materials (KJMM)
Kyocera Corporation
Kyoto University
Matsuura Machinery Corporation
Metal Industries Research and Development Centre (MTRDC)
Mitsubishi Electric Corporation (MEC)
Nagoya University -- Center for Cooperative Research in Advanced Science
Nagoya University -- Laboratory of Structure and Morphology Control
Nagoya University -- Department of Micro System Engineering
National Cheng Kung University
National Science Council
National Taiwan University
Olympus Corporate R&
D Center
RIKEN (The Institute of Physical &
Chemical Research)
Samsung Electro Mechanics Corp., R&
D Center

Sankyo Seiki
Sansyu Finetool Co., Ltd
Seiko Instruments Inc. (511)
Seoul National University
University of Electro Communications
University of Tokyo
I. I. S., The University of Tokyo
Yonsei University
D. Site Reports--Europe: BASELWORLD
Robert Bosch, GmbH
Ecole Polytechnique Federale De Lausanne (EPFL)
Fraunhofer Institute -- Manufacturing Engineering and Automation (IPA)

Fraunhofer Institute -- Production Systems and Design Technology (IPK)
Fraunhofer Institute -- Production and Laser Technology (IPT)/(ILT)
Fraunhofer Institute -- Reliability and Microintegration (IZM)
Karlsruhe Research Center
Kiocke Nanotechnik
Kugler GmbH
Laser Zentrum Hamiover e.V
Institut fur Mikrotechnik Mainz GmbH (1MM)
Philips Center for Industrial Technology (CFT)
Swiss Federal Institute ofTechnology -- Zurich (ETHZ)
Technical University of Eindhoven
Carl Zeiss Industrielle Messtechnik, GmbH
Zumtobel
E. Glossary.