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5th International Symposium on Plasma Process-Induced Damage, 2000
You are here: Sciences > Science: General Issues > Industrial Applications O...
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5th International Symposium on Plasma Process-Induced Damage, 2000
Paperback ISBN: 9780965157742
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This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.
| ISBN | 965157741 |
| ISBN13 | 9780965157742 |
| Publisher | I.E.E.E.Press |
| Format | Paperback |
| Publication date | 31/01/2001 |
| Pages | 182 |
| Weight (grammes) | 270.00 |
| Published in | United States |
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