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1997 IEEE 10th Micro Electro Mechanical Systems (Mems)
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These conference proceedings focus on the analysis, design, fabrication, operation and application of millimetre-scale or smaller electromechnical systems (MEMS). The papers discuss contemporary research on these various aspects of MEMS.
| ISBN | 780337743 |
| ISBN13 | 9780780337749 |
| Publisher | I.E.E.E.Press |
| Format | Paperback |
| Publication date | 30/09/1997 |
| Pages | 600 |
| Weight (grammes) | 260.00 |
| Published in | United States |
| Height (mm) | 279 |
| Width (mm) | 216 |
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